Precise focal-length measurement technique with a reflective Fresnel-zone hologram

Applied Optics

Volumn 42, Issue 19, 2003, Pages 3903-3909

  De Boo, Brian ^a   Sasian, Jose ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; LIGHT REFLECTION; LITHOGRAPHY; MIRRORS;

FRESNEL-ZONE HOLOGRAMS;

HOLOGRAMS;

EID: 0041808766     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.003903     Document Type: Article

References (17)

1. B. Howland and A. F. Proll, “Apparatus for the accurate determination of flange focal distance,” Appl. Opt. 11,1247-1251 (1970).
2. Y. Nakano and K. Murata, “Talbot interferometry for measuring the focal length of a lens,” Appl. Opt. 24, 3162-3166 (1985).
3. B. J. Pernick and B. Hyman, “Least-squares technique for determining principal plane location and focal length,” Appl. Opt. 26, 2938-2939 (1987).
4. C.-W. Chang and D. C. Su, “An improved technique of measuring the focal length of a lens,” Opt. Commun. 73, 257-262 (1989).
5. R. S. Sirohi, H. Kumar, and N. K. Jain, “Focal length measure-ment using diffraction at a grating,” in Optical Testing and Metrology III, C. P. Grover, ed., Proc. SPIE 1332, 50-55 (1990).
6. M. C. Gerchman and G. C. Hunter, “Differential technique for accurately measuring the radius of curvature of long radius concave optical surfaces,” Opt. Eng. 19, 843-848 (1980).
7. K. R. Freischlad, M. Kuchel, W. Wiedmann, W. Kaiser, and M. Mayer, “High-precision interferometric testing of spherical mirrors with long radius of curvature,” in Optical Testing and Metrology III, C. P. Grover, ed., Proc. SPIE 1332, 8-17 (1990).
8. I. Glatt and O. Kafri, “Determination of the focal length of nonparaxial lenses by Moire deflectometry,” Appl. Opt. 26, 2507-2508 (1987).
9. J. Z. Malacara, “Angle, distance, curvature, and focal length measurements,” in Optical Shop Testing, Second Edition, D. Malacara, ed. (Wiley, N. Y., 1992), pp. 715-741.
10. R. R. Shannon, The Art and Science of Optical Design (Cambridge University Press, Cambridge, UK, 1997), pp. 170-173.
11. J. E. Grievenkamp and J. H. Bruning, “Phase shifting interferometers,” in Optical Shop Testing, Second Edition, D. Malacara, ed. (Wiley, N. Y., 1992), pp. 501-598.
12. Veeco Metrology Group, Optical Profilers and Laser Interferometers, 2650 East Elvira Road, Tucson, Ariz. 85706-7123, http://www.veeco.com
13. K. Creath, “WYKO systems for optical metrology,” in Interferometric Metrology, N. A. Massie, ed., Proc. SPIE 816, 111-114 (1987).
14. E. Hecht, Optics, 3rd ed. (Addison Wesley Longman, Menlo Park, Calif., 1998), pp. 476-488.
15. M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University Press, Cambridge, UK, 1999), pp. 413-417.
16. G. R. Fowles, Introduction to Modern Optics (Dover, New York, 1989), pp. 125-129.
17. D. S. Goodman, “General principles of geometric optics,” in Handbook of Optics, 2nd ed., M. Bass, E. W. Van Stryland, D. R. Williams, W. L. Wolfe, eds. (McGraw-Hill, Inc., N. Y., 1995), Vol. 1, pp. 1.68-1.69.