Quantitative investigation of localized ion irradiation effects in n-channel metal-oxide-semiconductor field-effect transistors using single ion microprobe

Applied Physics Letters

Volumn 68, Issue 24, 1996, Pages 3467-3469

  Koh, Meishoku ^a   Horita, Katsuyuki ^a   Shigeta, Bungo ^a   Igarashi, Kai ^a   Matsukawa, Takashi ^a   Tanii, Takashi ^a   Mori, Shigetaka ^a   Ohdomari, Iwao ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041803085     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116076     Document Type: Article

References (12)

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