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Microsystem Technologies
Volumn 2, Issue 2, 1996, Pages 71-74
Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements
Author keywords

[No Author keywords available]
Indexed keywords

EID: 0041788596     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02447753     Document Type: Article
Times cited : (8)
References (8)
  • 1
    • 0022717983 scopus 로고
    • Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming and plastic moulding (LIGA process)
    • Becker EW; Ehrfeld W; Hagmann P; Maner A; Münchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming and plastic moulding (LIGA process). Microelectr. Eng. 4:35-56
    • (1986) Microelectr. Eng. , vol.4 , pp. 35-56
    • Becker, E.W.1    Ehrfeld, W.2    Hagmann, P.3    Maner, A.4    Münchmeyer, D.5
  • 2
    • 0037574621 scopus 로고
    • Instrumentation for glancing angle x-ray absorption spectroscopy on the synchrotron radiation source
    • Pizzini S; Roberts KJ; Greaves GN; Harris N; Moore P; Plantos E; Oldman RJ (1989) Instrumentation for glancing angle x-ray absorption spectroscopy on the synchrotron radiation source. Rev. Sci. Instrum. Vol. 60, No. 7:2525-2528
    • (1989) Rev. Sci. Instrum. , vol.60 , Issue.7 , pp. 2525-2528
    • Pizzini, S.1    Roberts, K.J.2    Greaves, G.N.3    Harris, N.4    Moore, P.5    Plantos, E.6    Oldman, R.J.7
  • 4
    • 0026123760 scopus 로고
    • Description of microstructures in LIGA-technology
    • Bley P; Bacher W; Menz W; Mohr J (1991) Description of microstructures in LIGA-technology. Microelectr. Eng. 13:509-512
    • (1991) Microelectr. Eng. , vol.13 , pp. 509-512
    • Bley, P.1    Bacher, W.2    Menz, W.3    Mohr, J.4
  • 5
    • 85033820338 scopus 로고
    • XPS and AES investigations of the adhesive bonding properties of thin titanium coatings
    • Kernforschungszentrum Karlsruhe
    • Moers H; Mohr J; Klewe-Nebenius H; Pfennig G (1988) XPS and AES investigations of the adhesive bonding properties of thin titanium coatings. KfK-Bericht 4297, Kernforschungszentrum Karlsruhe
    • (1988) KfK-Bericht 4297
    • Moers, H.1    Mohr, J.2    Klewe-Nebenius, H.3    Pfennig, G.4
  • 6
    • 33646928670 scopus 로고
    • Analyse der Defektursachen und der Genauigkeit der Strukturübertragung bei der Röntgentiefenlithographie mit Synchrotronstrahlung
    • Kernforschungszentrum Karlsruhe
    • Mohr J; Ehrfeld W; Münchmeyer D (1988) Analyse der Defektursachen und der Genauigkeit der Strukturübertragung bei der Röntgentiefenlithographie mit Synchrotronstrahlung. KfK-Bericht 4414, Kernforschungszentrum Karlsruhe
    • (1988) KfK-Bericht 4414
    • Mohr, J.1    Ehrfeld, W.2    Münchmeyer, D.3
  • 8
    • 4243381090 scopus 로고
    • Grazing-incidence diffraction and the distorted-wave approximation for the study of surfaces
    • Vineyard GH (1982) Grazing-incidence diffraction and the distorted-wave approximation for the study of surfaces. Phys. Rev. B 26; 8:4146-4159
    • (1982) Phys. Rev. B , vol.26 , Issue.8 , pp. 4146-4159
    • Vineyard, G.H.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.