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Volumn 67, Issue 1-3, 1998, Pages 142-145
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Media-isolated sensor
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Author keywords
Differential; Isolation; Media; Piezoresistive; Pressure; Sensors
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Indexed keywords
PIEZOELECTRIC DEVICES;
PRESSURE MEASUREMENT;
SILICON SENSORS;
MEDIA-ISOLATED SENSORS;
PRESSURE GAGES;
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EID: 0041783301
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-4247(97)01781-0 Document Type: Article |
Times cited : (5)
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References (2)
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