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Volumn 41, Issue 18, 2003, Pages 2091-2108
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Numerical simulation of coupled-stress case II diffusion in one dimension
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Author keywords
Adaptive time stepping; Case II diffusion; Glass transition; Lithography; Nonlinear coupled simulation; Viscoelasticity
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Indexed keywords
COMPUTER SIMULATION;
DIFFERENTIAL EQUATIONS;
DIFFUSION;
FINITE ELEMENT METHOD;
GLASS TRANSITION;
LITHOGRAPHY;
MATHEMATICAL MODELS;
NONLINEAR EQUATIONS;
ORGANIC SOLVENTS;
VISCOELASTICITY;
ADAPTIVE TIME STEPPING;
FINITE ELEMENT DISCRETIZATION;
GLASS-RUBBER TRANSITION;
NONLINEAR COUPLED SIMULATION;
SEMICONDUCTING POLYMERS;
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EID: 0041781827
PISSN: 08876266
EISSN: None
Source Type: Journal
DOI: 10.1002/polb.10551 Document Type: Article |
Times cited : (16)
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References (32)
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