Probe depth variation in grazing exit soft-X-ray emission spectroscopy

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 384, Issue 2-3, 1997, Pages 558-562

  Skytt, Per ^a   Gålnander, Björn ^a   Nyberg, Tomas ^a   Nordgren, Joseph ^a   Isberg, Peter ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; FILM GROWTH; FLUORESCENCE; THIN FILMS;

GRAZING X RAY EMISSION; SANDWICH STRUCTURED SAMPLES; SOFT X RAY EMISSION SPECTROSCOPY;

X RAY SPECTROSCOPY;

EID: 0041734577     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(96)00880-7     Document Type: Article

References (27)

1. W.C. Röntgen, Sitzungsberichte der Würzburger Physik-Medicin gesellschaft Jahrg., 1895,
2. reported in Ann. der Phys. 64 (1898) 1.
3. Translation by A. Straton in Science 3, 227 and 726 (1896).
4. L.G. Parratt, Phys. Rev. 95 (1954) 359.
5. W.C. Marra, P. Eisenberger and A.Y. Cho, J. Appl. Phys. 50 (1979) 6927.
6. Y. Yoneda and T. Horiuchi, Rev. Sci. Instr. 42 (1971) 1069.
7. V. Penka and W. Hub, Spectrochim. Acta B 44 (1989) 483.
8. R.S. Becker, J.A. Golovchenko and J.R. Patel, Phys. Rev. Lett. 50 (1983) 153.
9. T. Noma, A. Iida and K. Sakurai, Phys. Rev. B 48 (1993) 17524.
10. T.A. Roberts, D.H. Ko, K.E. Gray, Y.Y. Wang, R.P.H. Chang and S. Ogawa, Appl. Phys. Lett. 66 (1995) 2054.
11. K. Tsuji, S. Sato and K. Hirokawa, Rev. Sci. Instr. 66 (1995) 4847.
12. H.M. O'Brion and H.W.B. Skinner, Phys. Rev. 45 (1933) 370.
13. L.G. Parratt, Rev. Mod. Phys. 31 (1959) 616.
14. N. Wassdahl, A. Nilsson, T. Wiell, H. Tillborg, L.C. Duda, J.H. Guo, N. Mårtensson, J. Nordgren, J.N. Andersen and R. Nyholm, Phys. Rev. Lett. 69 (1992) 812.
15. P.K. de Bokx and H.P. Urbach, Rev. Sci. Instr. 65 (1995) 15.
16. H.P. Urbach and P.K. de Bokx, Phys. Rev. B 53 (1996) 3752.
17. M. Hecq and J. Leleux, Anal. Chem. 59 (1987) 440.
18. M. Georgsson, G. Bray, Y. Claesson, J. Nordgren, C.-G. Ribbing and N. Wassdahl, J. Vac. Sci. Technol. 9 (1991) 638.
19. P.B. Legrand, J.P. Dauchot, M. Hecq, M. Charbonnier and M. Romand, J. Vac. Sci. Technol. A 12 (1994) 1551.
20. A. Szasz and J. Kojnok, Appl. Surf. Sci. 24 (1985) 34.
21. A.S. Shulakov, Cryst. Res. Technol. 23 (1988) 835.
22. P. Skytt, C.J. Englund, D.C. Mancini, N. Wassdahl and J. Nordgren, SPIE 2283 (1994) p. 000
23. D.Y. Smith and J.H. Barkyoumb, Phys. Rev. B 41 (1990) 11529; E. Spiller, Appl. Opt. 29 (1990) 19.
24. D.Y. Smith and J.H. Barkyoumb, Phys. Rev. B 41 (1990) 11529; E. Spiller, Appl. Opt. 29 (1990) 19.
25. B.L. Henke, E.M. Gullikson and J.C. Davis, At. Data Nucl. Data Tables 54 (1993) 181.
26. B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro and B.K. Fujikawa, At. Data Nucl. Data Tables 27 (1982) 1.
27. B.L. Henke, Phys. Rev. A 6 (1972) 94.