Application of spectral reflectivity to the measurement of thin-film thickness

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4876, Issue 2, 2002, Pages 976-983

  Flaherty, Tony ^a   O'Connor, Gerard ^a  

^a NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

BENCHMARKING; COATINGS; COMPUTER SOFTWARE; LASER APPLICATIONS; SPECTRUM ANALYSIS; SURFACE PROPERTIES; WIRE;

SPECTRAL REFLECTANCE;

THIN FILMS;

EID: 0041731601     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.464264     Document Type: Conference Paper

References (2)

1. Hecht & Zajac, Optics, Addison Wesley 1974, p 294.
2. L. Deck and P. de Groot, High-speed non-contact profiler based on scanning white light interferometry, ASPE Proceedings, 1993, p. 424-426.