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Volumn 356-357, Issue , 2003, Pages 521-525
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Deuterium thermal desorption from FeTi thin films
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Author keywords
FeTi; Hydrogen desorption kinetics; Thin films
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Indexed keywords
ACTIVATION ENERGY;
DEPOSITION;
DESORPTION;
DEUTERIUM;
MAGNETRON SPUTTERING;
MOSSBAUER SPECTROSCOPY;
PRECIPITATION (CHEMICAL);
RAPID THERMAL ANNEALING;
REACTION KINETICS;
SILICON;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
X RAY SPECTROSCOPY;
THERMAL DESORPTION;
IRON COMPOUNDS;
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EID: 0041696656
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-8388(02)01258-6 Document Type: Conference Paper |
Times cited : (3)
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References (21)
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