Super-junction LDMOST on a silicon-on-sapphire substrate

IEEE Transactions on Electron Devices

Volumn 50, Issue 5, 2003, Pages 1385-1391

  Nassif Khalil, Sameh G ^a   Salama, C Andre T ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Insulating substrate; Lateral; Power MOSFET; Super junction (SJ)

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRIC BREAKDOWN; ELECTRIC FIELDS; INTEGRATED CIRCUITS; OPTIMIZATION; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR JUNCTIONS; SILICON ON SAPPHIRE TECHNOLOGY; SUBSTRATES;

INSULATING SUBSTRATE; REDUCED SURFACE FIELD DEVICES;

MOSFET DEVICES;

EID: 0041672257     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.813460     Document Type: Article

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