Directly heated quartz crystal microbalance with an integrated dielectric sensor

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 399-403

  Roth, Mathias ^a   Dera, Thomas ^a   Drost, Andreas ^a   Hartinger, Ralf ^a   Wendler, Frank ^a   Endres, Hanns Erik ^a   Hillerich, Bernd ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

Carbon dioxide; Heaters; Interdigital capacitors; Isotherms; Quartz; Quartz crystal microbalances; Water

Indexed keywords

ADSORPTION ISOTHERMS; CAPACITORS; CARBON DIOXIDE; CRYSTAL RESONATORS; EQUIPMENT TESTING; FABRICATION; HEATING EQUIPMENT; QUARTZ; TEMPERATURE; TEMPERATURE MEASURING INSTRUMENTS; WATER;

DRIFT; INTEGRATED DIELECTRIC SENSOR; INTERDIGITAL CAPACITORS; QUARTZ CRYSTAL MICROBALANCE; TEMPERATURE MODULATION; THIN FILM TECHNOLOGY;

CHEMICAL SENSORS;

EID: 0041636159     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00094-6     Document Type: Article

References (6)

1. C. Lu, A.W. Czanderna, Applications of Piezoelectric Quartz Crystal Microbalance, Methods and Phenomena, Their Applications in Science and Technology, vol. 7, Elsevier, Amsterdam, 1994.
2. H.-E. Endres, S. Drost, Optimization of the geometry of gas-sensitive interdigital capacitors, Sensors and Actuators B 4 (1991) 95-98.
3. M. Roth, R. Hartinger, R. Faul, H.-E. Endres, Performance enhancement of organic coated gas sensors by temperature modulation, Sensors and Actuators B 35-36 (1996) 1-5 and references cited therein.
4. M. Horn, A new theory of adsorption for the quantitative description of gas sensors, Sensors and Actuators B 26-27 (1995) 217-219.
5. M. Roth, Ph.D. Thesis, in preparation.
6. H.-E. Endres, L.D. Mickle, C. Kösslinger, S. Drost, F. Hutter, A gas-sensor system with dielectric and mass sensors, Sensors and Actuators B 6 (1992) 285-288.