Bias frequency, waveform and duty-cycle effects on the bias-enhanced nucleation of epitaxial diamond

Thin Solid Films

Volumn 440, Issue 1-2, 2003, Pages 145-151

  Wolter, S D ^a   Okuzumi, F ^a   Prater, J T ^b   Sitar, Z ^a  

^a North Carolina State University   (United States)

^b U S ARMY RESEARCH OFFICE   (United States)

Author keywords

Chemical vapor deposition; Diamond; Epitaxy; Plasma processing and deposition

Indexed keywords

CARBURIZING; CHEMICAL VAPOR DEPOSITION; DIAMONDS; NUCLEATION; PLASMA APPLICATIONS; SILICON; WAVEFORM ANALYSIS;

PULSED BIASING;

THIN FILMS;

EID: 0041620639     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00827-7     Document Type: Article

References (16)

1. W.G. Eversole, Synthesis of diamond by deposition on seed crystals. U.S. Patent No. 3,030,187 and 3,030,188 filed July 23, 1958; issued April 17, 1962.
2. Stoner B.R., Glass J.T. Appl. Phys. Lett. 60:1992;698.
3. Wolter S.D., Stoner B.R., Glass J.T., Ellis P.J., Buhaenko D.S., Jenkins C.E., Southworth P. Appl. Phys. Lett. 62:1993;1215.
4. Jiang X., Klages C.-P., Zachai R., Hartweg M., Füsser H.-J. Appl. Phys. Lett. 62:1993;3428.
5. Yugo S., Kanai T., Kimura T., Muto T. Appl. Phys. Lett. 58:1991;1036.
6. Kawarada H., Wild C., Herres N., Locher R., Koidl P. J. Appl. Phys. 81:1997;3490.
7. Yugo S., Kanai T., Kimura T., Muto T. Appl. Phys. Lett. 58:1991;1036.
8. Stoner B.R., Ma G.H., Wolter S.D., Zhu W., Wang Y.-C., Davis R.F., Glass J.T. Diamond Relat. Mater. 2:1993;142.
9. Wolter S.D., Glass J.T., Stoner B.R. J. Appl. Phys. 77:1995;5119.
10. Wolter S.D., Stoner B.R., Glass J.T. Diamond Relat. Mater. 3:1994;1188.
11. Jiang X., Jia C.L. Appl. Phys. Lett. 67:1995;1197.
12. Chen Q., Wang L.-X., Zhang Z., Yang J., Lin Z. Appl. Phys. Lett. 68:1996;176.
13. Wolter S.D., Borst T.H., Vescan A., Kohn E. Appl. Phys. Lett. 68:1996;3558.
14. Wolter S.D., Okuzumi F., Prater J.T., Sitar Z. J. Electrochem. Soc. 149:2002;G114.
15. Stoner B.R., Ma G.H., Wolter S.D., Glass J.T. Phys. Rev. B45:1992;11067.
16. Smith D.L. Thin-Film Deposition: Principles and Practice. 1995;McGraw-Hill, Inc, New York.