Preparation of copper(Cu) thin films by MOCVD and their conversion to copper selenide (CuSe) thin films through selenium vapor deposition

Bulletin of the Korean Chemical Society

Volumn 24, Issue 5, 2003, Pages 647-649

  Kim, Kyung Soo ^a   Jeong, Han Cheol ^a   Cho, Jung Young ^a   Kang, Dong Hee ^a   Kim, Hong Ki ^a   Yoo, Hee Min ^a   Shim, Il Wun ^a  

^a Chung Ang University   (South Korea)

Author keywords

Copper selenide thin film by selenium vapor deposition; Copper thin film by MOCVD

Indexed keywords

COPPER; COPPER SELENIDE; SELENIDE; SELENIUM; UNCLASSIFIED DRUG;

ARTICLE; CONDUCTANCE; EVAPORATION; FILM; INFRARED RADIATION; METAL BINDING; METAL ORGANIC CHEMICAL VAPOR DEPOSITION METHOD; SCANNING ELECTRON MICROSCOPY; SYNTHESIS; THICKNESS; VAPORIZATION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0041591071     PISSN: 02532964     EISSN: None     Source Type: Journal    
DOI: 10.5012/bkcs.2003.24.5.647     Document Type: Article

References (8)

1. Haram, S. K.; Santhanam, K. S. V.; Neumann-Spallart, M.; Lévy-Clément, C. Mater. Res. Bull. 1992, 27, 1185.
2. Korzhuev, A. A. Fiz. Khim. Obrab. Mater. 1991, 3, 131.
3. Chen, W. S.; Stewart, J. M.; Mickelsen, R. A. Appl. Phys. Lett. 1985, 46, 1095.
4. Stevels, A. L. N.; Jellinek, F. Recueil 1971, 111, 273.
5. Heyding, R. D. Can. J. Chem. 1966, 44, 1233.
6. Okimura, H.; Matsumae, T. Thin Solid Films 1980, 71, 53.
7. García, V. M.; Nair, P. K.; Nair, M. T. S. J. Cryst. Growth 1999, 203, 113.
8. Frederickson, A. R.; Levy, L.; Enloe, C. I. IEEE. Trans. Elec. Insul. 1992, 27, 1166.