Diagnostics of plasma emission spectra during electron assisted chemical vapor deposition of diamond films

Physics of Plasmas

Volumn 5, Issue 5 PART 1, 1998, Pages 1541-1544

  Zhu, Xiao Dong ^a   Hu, Min ^a   Zhan, Ru Juan ^a   Wen, Xiao Hui ^a   Zhou, Hai Yang ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041580052     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.872812     Document Type: Article

References (6)

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