Measurements of a component of the piezo-optic tensor of Si by reflectance difference spectroscopy

Journal of Applied Physics

Volumn 94, Issue 3, 2003, Pages 1458-1460

  Mori, Takahiro ^a   Kumagai, Naoto ^a   Hanada, Takashi ^a   Yao, Takafumi ^a   Yasuda, Tetsuji ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ELLIPSOMETRY; LIGHT POLARIZATION; LIGHT REFLECTION; OPTICAL PROPERTIES; PIEZOELECTRICITY; SPECTROSCOPY; STRESSES; TENSORS;

PIEZO-OPTIC TENSORS; REFLECTANCE DIFFERENCE SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0041510471     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1586965     Document Type: Article

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