Depth profile of implanted species with a detector telescope

Review of Scientific Instruments

Volumn 67, Issue 9, 1996, Pages 3092-3094

  Avasthi, D K ^a   Kabiraj, D ^a   Jain, A ^b   Mehta, G K ^a  

^a INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041506112     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147450     Document Type: Article

References (20)

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