Large-scale metal MEMS mirror arrays with integrated electronics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 467-476

  Bifano, Thomas ^a   Bierden, Paul ^b   Cornelissen, Steven ^a   Dimas, Clara ^b   Lee, Hocheol ^a   Miller, Michele ^c   Perreault, Julie ^a  

^a Boston University   (United States)

^b BOSTON MICROMACHINES CORPORATION   (United States)

^c Michigan Technological University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; LIGHT MODULATORS; LIGHT REFLECTION; MICROMACHINING; MIRRORS;

MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0041479328     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.462845     Document Type: Article

References (0)