Optimization of contact interface resistance for CMOS circuits

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 2003, Pages 174-178

  Zhou, Zhiping ^a   Brown, Devin K ^a   Woods, Eric V ^a   Sutton, Akil K ^a   Patel, Biren C ^a   George, Leslie O ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; ELECTRIC CONTACTS; ELECTRIC RESISTANCE; INTERFACES (MATERIALS); SCANNING ELECTRON MICROSCOPY; SINTERING;

CONTACT INTERFACE RESISTANCE;

CMOS INTEGRATED CIRCUITS;

EID: 0041438693     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. S. A. Campbell, "The Science and Engineering of Microelectronic Fabrication" Oxford University Press 2001.
2. http://cmos.mirc.gatech.edu/baselines/1.3um/flow.php (last viewed on May 1, 2003).