The polishing mechanism of electrochemical mechanical polishing technology

Journal of Materials Processing Technology

Volumn 140, Issue 1-3 SPEC., 2003, Pages 280-286

  Lee, Shuo Jen ^a   Lee, Yu Ming ^a   Du, Ming Feng ^a  

^a YUAN ZE UNIVERSITY   (Taiwan)

Author keywords

Electrochemical mechanical polishing; Electrochemical polishing mechanism; I V curves; Passive film

Indexed keywords

CURRENT DENSITY; CURRENT VOLTAGE CHARACTERISTICS; DISSOLUTION; ENERGY DISPERSIVE SPECTROSCOPY; POTENTIOMETERS (ELECTRIC MEASURING INSTRUMENTS); SCANNING ELECTRON MICROSCOPY; STEEL ANALYSIS; VOLTAGE MEASUREMENT;

ELECTROCHEMICAL MACHINING (ECM);

ELECTROLYTIC POLISHING;

EID: 0041408690     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(03)00720-9     Document Type: Conference Paper

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