The effects of ion sheath collisions on trench etch profiles

Journal of Applied Physics

Volumn 81, Issue 6, 1997, Pages 2547-2554

  Chen, Wenjing ^a   Abraham Shrauner, Barbara ^a  

^a WASHINGTON UNIVERSITY IN ST LOUIS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041392696     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363918     Document Type: Article

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