Optimization of gas utilization in plasma processes

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 3, 2003, Pages 429-435

  Namose, Isamu ^a  

^a SEIKO EPSON CORPORATION   (Japan)

Author keywords

Chemical vapor deposition; Environmental factors; Etching; Plasma diagnostics

Indexed keywords

CHEMICAL REACTIONS; CHEMICAL VAPOR DEPOSITION; CLEANING; ENVIRONMENTAL PROTECTION; ETCHING; FLUORINE COMPOUNDS; GAS EMISSIONS; NITRIDES; OPTIMIZATION; PLASMA APPLICATIONS; PLASMA DIAGNOSTICS; SULFUR COMPOUNDS;

ENVIRONMENTAL FACTORS; NITRIDE ETCHING; PERFLUORO COMPOUNDS; PLASMA EFFICIENCY; TAGUCHI METHOD;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0041384592     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.815635     Document Type: Article

References (10)

1. L. Marinelli and W. Worth, "Global warming: A white paper on the science, policies and control technologies that impact the U.S. semiconductor industry," SEMATECH Technology Transfer #93 112074A-TR.
2. C. Beitler and C. Berry, "Global warming impact model," SEMATECH Technology Transfer #95022713A-ENG.
3. W. Worth et al., "Analysis of data for Perfluorocompound (PFC) emission control systems," SEMATECH Technology Transfer # 95062847A-ENG.
4. "Tool Perfluorocompound (PFC) emissions data report," SEMATECH Technology Transfer #96073156B-ENG
5. I. Namose, "Optimization of plasma cleaning efficiency as chemical reactions," in Proc. Quality Engineering Symp. 2001, pp. 142-145.
6. J. Mayer, "Equipment environmental characterization guidelines Rev. 3.0,"
7. "S68 Final Rep.: Template methodology and lessons learned for sampling and analyzing tool effluents,", SEMATECH Technology Transfer #95123039A-TR.
8. I. Namose and T. Sugiura. Easy measuring method of PFC's quantified by FT-IR intended to complement equipment environmental characterization guideline (commonly called Intel protocol). [Online]. Available: http://www.epson.co.jp/e/ec/EPSONMethod012_E1.pdf.
9. G. Taguchi et al., Robust Engineering. New York: McGraw-Hill, ISBN 0-07-134782-8.
10. G. Taguchi, "Mathematics for quality engineering," Japanese Standards Asso., ISBN4-542-51118-9.