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Volumn 321, Issue 2-3, 2003, Pages 152-157

Study in chemical bonding states of SiC films before and after hydrogen ion irradiation

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ION BEAMS; ION BOMBARDMENT; SPUTTERING; STAINLESS STEEL; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0041380839     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(03)00238-1     Document Type: Article
Times cited : (8)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.