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Volumn 321, Issue 2-3, 2003, Pages 152-157
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Study in chemical bonding states of SiC films before and after hydrogen ion irradiation
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Author keywords
[No Author keywords available]
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Indexed keywords
BONDING;
ION BEAMS;
ION BOMBARDMENT;
SPUTTERING;
STAINLESS STEEL;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
CHEMICAL BONDING;
SILICON CARBIDE;
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EID: 0041380839
PISSN: 00223115
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3115(03)00238-1 Document Type: Article |
Times cited : (8)
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References (15)
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