Fabrication of low loss optical waveguides using a novel photosensitive polyimide

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4997, Issue , 2003, Pages 103-108

  Mune, Kazunori ^a   Naito, Ryusuke ^a   Fukuoka, Takahiro ^a   Mochizuki, Amane ^a   Matsumoto, Kenji ^b   Yurt, Nasuhi ^c   Meredith, Gerald ^c   Jabbour, Ghassan ^c   Peyghambarian, Nasser ^c  

^a NITTO DENKO CORPORATION   (Japan)

^b Biomedical Group   (United States)

^c UNIVERSITY OF ARIZONA   (United States)

Author keywords

Clad; Core; Development; Optical loss; Photosensitive; Polyimide; Waveguide

Indexed keywords

ETCHING; GLASS; PHOTOSENSITIVITY; POLYIMIDES; SUBSTRATES;

OPTICAL LOSS;

OPTICAL WAVEGUIDES;

EID: 0041360018     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.475449     Document Type: Conference Paper

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