Simulation of recombination contrast of extended defects in the modulated EBIC

Materials Science and Engineering B

Volumn 42, Issue 1-3, 1996, Pages 176-180

  Sirotkin, V V ^a   Yakimov, E B ^a   Zaitsev, S I ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

Contrast dependence; Defect region parameters reconstruction; Electron beam induced current

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAMS; INDUCED CURRENTS; MATHEMATICAL MODELS;

CONTRAST DEPENDENCE; DEFECT REGION PARAMETERS RECONSTRUCTION; ELECTRON BEAM INDUCED CURRENT (EBIC); RECOMBINATION CONTRAST;

CRYSTAL DEFECTS;

EID: 0041353498     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01702-3     Document Type: Article

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