Frictional properties of the micro-textured surface of anisotropically etched silicon

CIRP Annals - Manufacturing Technology

Volumn 52, Issue 1, 2003, Pages 471-474

  Moronuki, N ^a   Furukawa, Y ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Anisotropic etching; Friction; Texture

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; CRYSTAL SYMMETRY; ETCHING; FRICTION; PROBES; SEMICONDUCTING SILICON; SPATIAL VARIABLES MEASUREMENT; TEXTURES;

ANISOTROPICALLY ETCHED SILICON; ASYMMETRIC TEXTURE; FRICTIONAL DIRECTIONALITY; MICRO-TEXTURED SURFACE;

SURFACE STRUCTURE;

EID: 0041341836     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60628-3     Document Type: Article

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