Infrared wavelength selective micromachined microbolometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 II, Issue , 2003, Pages 514-522

  Kim, Jun Wan ^a   Neikirk, Dean P ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Blackbody spectrum; Infrared; Microbolometer; Tunable Fabry Perot cavity; Uncooled device; Wavelength selectivity

Indexed keywords

BOLOMETERS; COMPUTER SIMULATION; FABRY-PEROT INTERFEROMETERS; INFRARED RADIATION; MICROMACHINING;

BLACKBODY SPECTRUM; MICROBOLOMETERS; TUNABLE FABRY-PEROT CAVITY; WAVELENGTH SELECTIVITY;

MICROOPTICS;

EID: 0041328020     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499017     Document Type: Conference Paper

References (6)

1. A. R. Jha. Infrared Technology, John Wiley & Sons, Inc., 2000.
2. Ronald G. Driggers, Paul Cox, and Timothy Edwards, Introduction to Infrared and Electro-Optical Systems, Artech House, Inc., 1999.
3. Seung-Jin Yoo, Micromachined Wavelength Selective Microbolometer Sensors Operating at Room Temperature, PhD. Dissertation, The University of Texas at Austin, December 2000.
4. Young Min Kim, Application of Micromachining Techniques for Fabry-Perot Cavity Based Microsensors, PhD. Dissertation, The University of Texas at Austin, August 1995.
5. Gregory T. A. Kovacs, Micromachined Transducers Sourcebook, WCB & McGraw-Hill, 1998.
6. J. M. Lloyd, Thermal Imaging Systems, Plenum Press, 1979.