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Volumn 51, Issue 1 PART B, 1996, Pages 41-54

Spatially resolved measurements of ion density behind the skimmer of an inductively coupled plasma mass spectrometer

Author keywords

Beam profile; Inductively coupled plasma mass spectrometry; Ion density; Skimmer; Space charge

Indexed keywords


EID: 0041322317     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/0584-8547(95)01387-3     Document Type: Article
Times cited : (32)

References (75)
  • 33
    • 0041396802 scopus 로고
    • G. Holland and A.N. Eaton (Eds.), The Royal Society of Chemistry, Cambridge
    • P.J. Turner, in G. Holland and A.N. Eaton (Eds.), Applications of Plasma Source Mass Spectrometry, The Royal Society of Chemistry, Cambridge, 1991, p. 70.
    • (1991) Applications of Plasma Source Mass Spectrometry , pp. 70
    • Turner, P.J.1
  • 47
    • 0004236295 scopus 로고
    • Science and Technology, Academic Press, New York
    • J.F. Ziegler, Ion Implantation, Science and Technology, Academic Press, New York, 1988.
    • (1988) Ion Implantation
    • Ziegler, J.F.1
  • 56
    • 85029997005 scopus 로고
    • personal communications
    • R.C. Hutton and D. Gregson, personal communications, 1992.
    • (1992)
    • Hutton, R.C.1    Gregson, D.2
  • 69
    • 0042899902 scopus 로고
    • personal communication
    • S.D. Tanner, personal communication, 1995.
    • (1995)
    • Tanner, S.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.