Ellipsometric method for investigation of the optical anisotropy of thin films: Theory and calculations

Thin Solid Films

Volumn 307, Issue 1-2, 1997, Pages 192-199

  Bortchagovsky, E G ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

Anisotropy; Ellipsometry; Optical properties

Indexed keywords

ANISOTROPY; COMPUTATIONAL METHODS; ELLIPSOMETRY; OPTICAL PROPERTIES; SENSITIVITY ANALYSIS; SUBSTRATES; THIN FILMS;

TRANSVERSE OPTICAL ANISOTROPY;

OPTICAL FILMS;

EID: 0041161585     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00037-0     Document Type: Article

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