Two-color interferometer for surface characterization using two frequency doublers and a four–phase–step method

Applied Optics

Volumn 35, Issue 13, 1996, Pages 2179-2181

  Matsumoto, Hirokazu ^a   Zeng, Lijiang ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Common path interferometer; Phase shifting interferometer; Surface measurement

Indexed keywords

EID: 0041134764     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.002179     Document Type: Article

References (11)

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