Athermal annealing of Silicon

Physical Review Letters

Volumn 78, Issue 8, 1997, Pages 1584-1587

  Grun, J ^a   Manka, C K ^a   Hoffman, C A ^a   Meyer, J R ^a   Glembocki, O J ^a   Kaplan, R ^a   Qadri, S B ^a   Skelton, E F ^a   Donnelly, D ^b   Covington, B ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SAM HOUSTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041065602     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.78.1584     Document Type: Article

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