Scaling of surface roughness in a heterogeneous film growth system: on Si

Physical Review B - Condensed Matter and Materials Physics

Volumn 53, Issue 12, 1996, Pages R7610-R7613

  Mou, Chung Yu ^a   Hsu, J ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041063296     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.53.R7610     Document Type: Article

References (31)

1. D. E. Wolf and J. Villain, Europhys. Lett. 13, 389 (1990)
2. Z.-W. Lai and S. Das Sarma, Phys. Rev. Lett. 66, 2348 (1991)
3. J. Villain, J. Phys. I (France) 1, 19 (1991)
4. M. Kardar, G. Parisi, and Y.-C. Zhang, Phys. Rev. Lett. 56, 889 (1986)
5. H. Yan, Phys. Rev. Lett. 68, 3048 (1992)
6. D. A. Kessler, H. Levine, and L. M. Sander, Phys. Rev. Lett. 69, 100 (1992)
7. F. Family and T. Vicsek, J. Phys. A 18, L75 (1985)
8. Y. Tu, Phys. Rev. Lett. 73, 3109 (1994)
9. L. H. Tang and T. Nattermann, Phys. Rev. Lett. 66, 2899 (1991) C.-Y. Mou (unpublished)
10. M. D. Johnson et. al Phys. Rev. Lett. 72, 116 (1994)
11. C. Orme et. al Appl. Phys. Lett. 64, 860 (1994)
12. Y.-L. He et. al Phys. Rev. Lett. 69, 3770 (1992)
13. J. Krim et. al Phys. Rev. Lett. 70, 57 (1993)
14. M. A. Cotta et. al Phys. Rev. Lett. 70, 4106 (1993)
15. W. M. Tong et. al Phys. Rev. Lett. 72, 3374 (1994)
16. E. A. Fitzgerald et. al Appl. Phys. Lett. 59, 811 (1991)
17. Y. H. Xie et. al J. Mater. Sci. Eng. B 14, 332 (1992)
18. E. A. Fitzgerald et. al J. Vac. Sci. Technol. B 10, 1807 (1992)
19. M. V. H. Rao, B. K. Mathur, and K. L. Chopra, Appl. Phys. Lett. 65, 124 (1994)
20. J. W. P. Hsu et. al Appl. Phys. Lett. 61, 1293 (1992)
21. W. T. Pike, R. W. Fathauer, and M. S. Anderson, J. Vac. Sci. Technol. B 10, 1990 (1992)
22. S. Y. Shiryaev, F. Jensen, and J. W. Petersen, Appl. Phys. Lett. 64, 3305 (1994)
23. M. A. Lutz et. al Appl. Phys. Lett. 66, 724 (1995)
24. M. Albrecht et. al Appl. Phys. Lett. 67, 1232 (1995)
25. A. G. Cullis et. al J. Cryst. Growth 123, 333 (1992)
26. W. W. Mullins, J. Appl. Phys. 28, 333 (1957)
27. A.-L. Barabási and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995)
28. S. F. Edwards and D. R. Wilkinson, Proc. R. Soc. London Ser. A 381, 17 (1982)
29. [C. Roland and G. H. Gilmer, Phys. Rev. B 47, 16 286 (1993)]
30. A. Zangwill, Physics at Surfaces (Cambridge University Press, Cambridge, 1988), p. 11
31. S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1981)