Roughness of the silicon (001)/SiO2 interface

Applied Physics Letters

Volumn 62, Issue 24, 1993, Pages 3144-3146

  Tang, Mau Tsu ^a   Evans Lutterodt, K W ^a   Higashi, G S ^a   Boone, T ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041029621     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.109109     Document Type: Article

References (16)