Polyimide thick films prepared by vapor deposition polymerization and their applications

Shinku/Journal of the Vacuum Society of Japan

Volumn 42, Issue 11, 1999, Pages 992-995

  Takahashi, Yoshikazu ^a   Iida, Keiko ^a   Iijima, Masayuki ^a  

^a ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040962805     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.42.992     Document Type: Article

References (4)

1. M. Iijima and Y. Takahashi: High Perform. Polym., 5 (1993) 229.