Synthesis and polymerization of 3-(t-butoxycarbonyl)-1-vinylcaprolactam and application as deep UV resists

Polymer Bulletin

Volumn 38, Issue 3, 1997, Pages 241-247

  Kim, Jin Baek ^a   Jung, Min Ho ^a   Chang, Kyeong Ho ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040833731     PISSN: 01700839     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002890050044     Document Type: Article

References (15)

1. Jain K, Lin BJ, Willson CG (1982) IBM J. Res. Dev. 26: 151.
2. Pol V, Bennewitz JH, Escher GC (1986) Proc. SPIE 633: 6.
3. Endo M, Sasago M, Hirai Y, Ogawa K, Ishihara T (1987) Proc. SPIE 774: 138.
4. Allen RD, Wallraff GM, Hinsberg WD, Simpson LL (1991) J. Vac. Sci.Technol. B9: 3357.
5. Crivello JV, Shim SY (1995) J. Polym. Sci.; Polym. Chem. Ed. 33: 513.
6. Kaimoto Y, Nozaki K, Takechi S, Ave N (1992) Proc. SPIE 1672: 66.4.
7. Nakase M (1993) IEICE Trans. Electron E76-C: 26.
8. Ito H, Breyta G, Hofer R (1994) J. Photopolym. Sci. Technol. 7: 433.
9. Ushirogochi T, Kihara N, Saito S, Naito T, Asakawa K (1994) Proc. SPIE 2195: 205.
10. Kawai Y, Otaka A, Tanaka A, Matsuda T (1994) Jpn. J.Appl. Phys. 33: 7023.
11. Kawai Y, Otaka A, Nakamura J, Tanaka A, Matsuda T (1995) J. Photopolym. Sci. Technol. 8: 535.
12. Dekar JL, Hacker NP (1990) J. Am. Chem. Soc. 112: 6004.
13. Wildi BS, Taylor SW, Potratz HA (1951) J. Am. Chem. Soc. 73: 1965.
14. Crivello JV, Lam JHW (1978) J. Org. Chem. 43: 3055.
15. Ito H, Willson CG (1984) In Polymers in Electronics ( edited by T. Davidson), ACS Symposium Series No. 242, American Chemical Society,Washington, DC, p. 11.