On the mechanism of (111)-defect formation in silicon studied by in situ electron irradiation in a high resolution electron microscope

Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

Volumn 77, Issue 2, 1998, Pages 423-435

  Fedina, L ^a,b   Gutakovskii, A ^a   Aseev, A ^a   Van Landuyt, J ^b   Vanhellemont, J ^c,d  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^b UNIVERSITY OF ANTWERP   (Belgium)

^c IMEC   (Belgium)

^d SILTRONIC AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040691370     PISSN: 01418610     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418619808223762     Document Type: Article

References (27)

1. Aseev, A. L., Fedina, L., Hoehl, D., and Bartsch, H., 1994, Clusters of Interstitial Atoms in Silicon and Germanium (Berlin: Academy Verlag), p. 152.
2. Baraff, G. A., Kane, E. O., and Schluter, M., 1980, Phys. Rev. B, 21, 5662.
3. Beaufort, M., Garem, H., and Lepinoux, J., 1994, Phil. Mag. A, 69, 881.
4. Chou, C. T., Cockayne, D. J. H., Zou, J., Kringhoj, P., and Jagadish, C., 1995, Phys. Rev. B, 52, 17223.
5. Coene, W., Bender, H., and Amelinckx, S., 1985, Phil. Mag. A, 52, 369.
6. Fedina, L., and Aseev, A. L., 1986, Phys. Status Solidi (a), 95, 517.
7. Fedina, L., Gutakovskii, A., Aseev, A. L., Van Landuyt, J., and Vanhellemont, J., 1996, Proceedings of EUREM’96, Dublin (to be published).
8. Fedina, L., Gutakovski, A., and Chuvilin, A., 1994, ICEM-13, Paris, 2A, 99.
9. Fedina, L., Van Landuyt, J., Vanhellemont, J., and Aseev, A. L., 1995, Nucl. Instrum. Methods Phys. Res. B, 112, 133.
10. Gutakovski, A., Fedina, L., and Aseev, A. L., 1995, Phys. Status Solidi (a), 50, 127.
11. Hutchison, J. L., Aseev, A. L., and Fedina, L., 1993, Institute of Physics Conference Series No. 134, section 1 (Bristol: Institute of Physics), p. 41.
12. Katcki, J., and Ast, D. 1988, J. appl. Phys., 54, 144.
13. Keating, P. N., 1966, Phys. Rev. A, 145, 637.
14. Kohyama, M., and Takeda, S., 1992, Phys. Rev. B, 46, 12305.
15. Kuwabara, M., Endoh, H., Tsubokawa, Y., Hashimoto, H., Yokota, Y., and Shimizu, R., 1985, International Symposium on in situ Experiments with HVEM, Osaka University, p. 341.
16. Muto, S., Takeda, S., and Hirata, M., 1995, Phil. Mag. A, 72, 1057.
17. Nandedkar, A. S., and Narayan, J., 1987, Phil. Mag. A, 56, 625.
18. Oshima, R., and Hua, G. C., 1991, Ultramicroscopy, 39, 150.
19. Parisini, A., and Bourret, A., 1993, Phil. Mag. A, 67, 605.
20. Reiche, M., and Breitenstein, O., 1987, Phys. Status Solidi (a), 101, K97.
21. Takeda, S., 1991, Jpn. J. appl. Phys., 30, L639.
22. Takeda, S., Hirata, M., Muto, S., Hua, G.-C., Hiraga, K., and Kiritani, M., 1991, Ultramicroscopy, 39, 180.
23. Takeda, S., and Horiuchi, S., 1994, Ultramicroscopy, 54, 144.
24. Takeda, S., Kohyama, M., and Ibe, K., 1994, Phil. Mag. A, 4, 287.
25. Tan, T. Y., 1981, Phil. Mag. A, 44, 101.
26. Vanhellemont, J., and Romano-Rodríguez, A., 1994, Appl. Phys. A, 58, 541.
27. Vanhellemont, J., Romano-Rodriquez, A., Fedina, L., Van Landuyt, J., and Aseev, A., 1995, Mater. Sci. Technol., 11, 1194.