SCOPUS 정보 검색 플랫폼

Volumn 52, Issue 12, 1988, Pages 1023-1025

Proximity gettering with mega-electron-volt carbon and oxygen implantations

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040679686 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.99233 Document Type: Article

Times cited : (145)

References (22)

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2
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- (1986) Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon , pp. 331
- Ourmazd, A.¹

3
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4
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5
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16
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- (1977) Semiconductor Silicon 1977 , pp. 565
- Foll, H.¹ Gosele, U.² Kolbesen, B.O.³

19
- 0001029984
- edited by J. C. Mikkelsen, Jr. S. J. Pearton, J. W. Corbett, and S. J. Pennycook (Materials Research Society, Pittsburgh).
- (1986) Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon , pp. 419
- Gosele, U.¹

20
- 0002427970
- edited by G. E. Murch and A. S. Norwich (Academic, New York).
- (1984) Diffusion in Crystalline Solids , pp. 64
- Frank, W.¹ Gosele, U.² Mefarer, H.³ Seeger, A.⁴

21
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- edited by H. R. Huff and E. Sirtl (Electrochemical Society, Pennington).
- (1977) Semiconductor Silicon 1977 , pp. 715
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22
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- Ph.D. dissertation, University of California at Berkeley.
- (1987)
- Jones, K.S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.