The effects of temperature jump on CVD modeling

Chemical Vapor Deposition

Volumn 8, Issue 5, 2002, Pages 205-212

  Hu, Tailai ^a   Glumac, Nick G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Gallium arsenide; Growth mechanisms; Modeling methods; Silicon carbide

Indexed keywords

ADSORPTION; CATALYSIS; FILM GROWTH; KINETIC ENERGY; SEMICONDUCTING GALLIUM ARSENIDE; SILICON CARBIDE; SUBSTRATES; THERMAL DIFFUSION; THERMAL EFFECTS;

GAS-PHASE TEMPERATURE; GROWTH MECHANISMS; MODELING METHODS; STAGNATION FLOW;

CHEMICAL VAPOR DEPOSITION;

EID: 0040672015     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(20020903)8:5<205::AID-CVDE205>3.0.CO;2-4     Document Type: Article

References (15)

1. C. R Kleijn, J Electrochem Soc. 1991, 138, 2190.
2. M. D Allendorf, R. J. Kee, J Electrochem Soc. 1991, 138, 841.
3. M. E. Coltrin, R. J. Kee, Mater Res. Soc. Symp. Proc. 1989, 145, 119.
4. E. Meeks, R. J. Kee, D. S Dandy, M. E. Coltrin, Combust Flame 1993, 92, 144.
5. M. E. Coltrin, R J. Kee, G. H. Evans, E. Meeks, F. M. Rupley, J. F. Grear, SPIN: A Fortran Program for Modeling One-Dimensional Rotating-Disk/Stagnation-Flow Chemical Vapor Deposition Reactors, Technical Report SAND91-8003, Sandia National Laboratories 1991.
6. M. Knudsen, The Kinetic Theory of Gases: Some Modern Aspects. John Wiley, New York 1952.
7. D. E Rosner, D H. Papadopoulos, Ind. Eng. Chem. Res. 1996, 35, 3210.
8. O. Leroy, J. Perrin, J. Jolly, M. Pealat, M. Lefebvre, J. Phys. D. Appl Phys 1997, 30, 499.
9. K. E. Bertagnolli, R. P. Lucht, Twenty-Sixth Symp (Int.) on Combustion, The Combustion Institute, Pittsburgh, PA 1996, p. 1825.
10. S Roy, W. D. Kulatilaka, R. P. Lucht, N. C. Glumac, T. Hu, "Investigation of Temperature Jump and Flame Structure in Low-Pressure Diamond-Forming Flames Using Hydrogen CARS Temperature Measurement", unpublished.
11. S. C. Saxena, Thermal Accommodation and Adsorption Coefficients of Gases, Hemisphere publishing, New York 1989.
12. S. Song, M. M. Yovanovich, in Fundamentals of Conduction and Recent Developments in Contact Resistance (Eds: G. P. Peterson, M. Imber, M. M. Yovanovich), American Society of Mechanical Engineers, New York 1987, p. 101.
13. M B. Lee, Q. Y Yang, S T. Ceyer, J Chem. Phys. 1987, 87, 2724.
14. P Ho, M. E. Coltrin, W. G. Breiland, J. Phys. Chem. 1994, 98, 10 138.
15. C. P Chou, Numerical Studies of Methane-Air combustion in Homogeneous and Heterogeneous Systems with Detailed chemistry, Ph.D Thesis, University of California, Berkeley, CA 1998