Effects of process parameters on ultrafine SiC synthesis using induction plasmas

Plasma Chemistry and Plasma Processing

Volumn 17, Issue 2, 1997, Pages 219-249

  Guo, J Y ^a   Gitzhofer, F ^a   Boulos, M I ^a  

^a UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

Induction plasma; Parametric study; Reaction mechanism; Synthesis; Ultrafine sic

Indexed keywords

EID: 0040645787     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02766817     Document Type: Article

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