A three-axis micropositioner for ultrahigh vacuum use based on the inertial slider principle

Review of Scientific Instruments

Volumn 67, Issue 4, 1996, Pages 1472-1474

  Erlandsson, R ^a   Olsson, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040486296     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146876     Document Type: Article

References (11)

1. Princeton Research Instruments Inc., P.O. Box 1174, Princeton, NJ 08542.
2. "Inchworm systems" catalog, Burleigh Instruments Inc., Burleigh Park, Fishers, NY 14453.
3. S. Hosaka, Y. Honda, T. Hasewaga, T. Yamamoto, and M. Kondo, Rev. Sci. Instrum. 64, 3524 (1993).
4. G. Binnig and H. Rohrer, Surf. Sci. 126, 236 (1983).
5. D. W. Pohl, Rev. Sci. Instrum. 58, 54 (1987).
6. B. L. Blackford, Rev. Sci. Instrum. 64, 1360 (1993).
7. M. Göken, Rev. Sci. Instrum. 65, 2252 (1994).
8. L. Howald, H. Rudin, and H.-J. Günterherodt, Rev. Sci. Instrum. 63, 3909 (1992).
9. Ch. Renner, Ph. Niederman, A. D. Kent, and Ø. Fischer, Rev. Sci. Instrum. 61, 965 (1990).
10. L. Libioulle, A. Ronda, I. Derycke, J. P. Vigneron, and J. M. Gilles, Rev. Sci. Instrum. 64, 1489 (1993).
11. Piezoelectric material of type PZ 23 supplied from Ferroperm, Herjeskovvej 6, DK-3490 Kvistgård, Denmark.