Nanogrinder for high precision machining of silicon wafers

Industrial Diamond Review

Volumn 59, Issue 580, 1999, Pages

  Koennemann, G ^a   Eichhorn, H ^a   Petzold, R ^a  

^a Nuernberg GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FACTORY AUTOMATION; PRECISION ENGINEERING; PROCESS ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

WAFER GRINDING TECHNOLOGY;

GRINDING (MACHINING);

EID: 0040427126     PISSN: 00198145     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)