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Review of Scientific Instruments

Volumn 63, Issue 2, 1992, Pages 1680-1689

Subnanometer behavior of a capacitive feedback, piezoelectric displacement actuator

(3) Harb, S a Smith, S T a Chetwynd, D G a

a UNIVERSITY OF WARWICK (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040420882 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.1143323 Document Type: Article

Times cited : (16)

References (14)

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14
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- (to be published)
- Harb, S.¹ Chetwynd, D.G.² Smith, S.T.³ Hicks, T.R.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.