Analysis of micropump operation using HDL-A macromodels

European Solid-State Device Research Conference

Volumn , Issue , 1996, Pages 199-202

  Voigt, Peter ^a   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MACRO-MODELS; MICRO PUMP;

EID: 0040328132     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. St. D. Senturia: CAD for Micro Electro Mechanical Systems. Digest of Tech. Papers of Transducers '95, Stockholm (1995), pp. 5-8
2. Anacad: HDL-A User's manual Ulm (1995)
3. R. Gupta et al.: Domain Characterization of Transmission Line Models and Analyses. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 15, No.2, Feb. 1996, pp. 184-193
4. R. Zengerle: Mikro-Membranpumpen als Komponenten für Mikro-Fluidsysteme. Verlag Shaker, Aachen (1994)
5. R. Zengerle et al.: A bidirectional silicon micropump. Sensors and Actuators A 50 (1995), pp. 81-86