Ohmic contacts to semiconducting diamond using a Ti/Pt/Au trilayer metallization scheme

Diamond and Related Materials

Volumn 5, Issue 12, 1996, Pages 1450-1456

  Hoff, H A ^a   Waytena, G L ^a   Vold, C L ^a   Suehle, J S ^b   Isaacson, I P ^a   Rebbert, M L ^a   Ma, D I ^a   Harris, K ^c  

^a NAVAL RESEARCH LABORATORY   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c Harris Diamond Corporation   (United States)

Author keywords

Diamond single crystals; Diffusion; Electrical properties; Surface characterization

Indexed keywords

EID: 0040309413     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(96)00566-3     Document Type: Article

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