Effects of the oxidation process on the electrical characteristics of oxidized nitride films

Applied Physics Letters

Volumn 69, Issue 8, 1996, Pages 1140-1142

  Mazumder, M K ^a   Katayama, T ^a   Kobayashi, K ^a   Mashiko, Y ^a   Koyama, H ^a   Yasuoka, A ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040255603     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117084     Document Type: Article

References (11)

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