Analysis of the gas phase by in situ FTIR spectrometry and mass spectrometry during the CVD of pyrocarbon from propane

Chemical Vapor Deposition

Volumn 5, Issue 1, 1999, Pages 37-47

  Féron, Olivier ^a   Langlais, Francis ^a   Naslain, Roger ^a  

^a Laboratoire des Composites Thermostructuraux   (France)

Author keywords

Chemical vapor deposition; Infrared spectroscopy; Propane; Pyrolytic carbon; Reaction mechanism

Indexed keywords

EID: 0040218485     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3862(199901)5:1<37::AID-CVDE37>3.0.CO;2-8     Document Type: Article

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