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Acta Physica Slovaca

Volumn 50, Issue 4, 2000, Pages 439-459

Investigations on the energy influx at plasma surface processes

(8) Kersten, H a Rohde, D a Deutsch, H a Hippler, R a Stoffels, W W b Stoffels, E b Kroesen, G M W b Berndt, J c

a UNIVERSITY OF GREIFSWALD (Germany)

b EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

c RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040195716 PISSN: 03230465 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (6)

References (47)

1
- 0016083153
- J. A. Thornton: J. Vac. Sci. Technol. 11 (1974) 666
- (1974) J. Vac. Sci. Technol. , vol.11 , pp. 666
- Thornton, J.A.¹

2
- 0023382472
- B. Hussla, K. Enke, H. Grunwald, G. Lorenz, H. Stoll: J. Phys. D, Appl. Phys. 20 (1987) 889
- (1987) J. Phys. D, Appl. Phys. , vol.20 , pp. 889
- Hussla, B.¹ Enke, K.² Grunwald, H.³ Lorenz, G.⁴ Stoll, H.⁵

3
- 84985810430
- H. Deutsch, H. Kersten, A. Rutscher: Contrib. Plasma Phys. 29 (1989) 263
- (1989) Contrib. Plasma Phys. , vol.29 , pp. 263
- Deutsch, H.¹ Kersten, H.² Rutscher, A.³

4
- 84985788225
- H. Deutsch, H. Kersten, S. Klagge, A. Rutscher: Contrib. Plasma Phys. 28 (1988) 149
- (1988) Contrib. Plasma Phys. , vol.28 , pp. 149
- Deutsch, H.¹ Kersten, H.² Klagge, S.³ Rutscher, A.⁴

5
- 0001437501
- J. L. Zubimendi, M. E. Vela, R. C. Salvarezza, C. Vazquez, J. Vara, A. J. Arvia: Phys. Rev. E 50 (1994) 1367
- (1994) Phys. Rev. E , vol.50 , pp. 1367
- Zubimendi, J.L.¹ Vela, M.E.² Salvarezza, R.C.³ Vazquez, C.⁴ Vara, J.⁵ Arvia, A.J.⁶

6
- 0000172103
- S. D. Bernstein, T. Y. Wong, R. W. Tustison: J. Vac. Sci. Technol. B 12 (1994) 605
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 605
- Bernstein, S.D.¹ Wong, T.Y.² Tustison, R.W.³

7
- 17644437943
- S. Kugler, K. Shimakawa, T. Watanabe, K. Hayashi, I. Laszlo, R. Bellissent: J. Non-Crystalline Solids 164-166 (1993) 1143
- (1993) J. Non-Crystalline Solids , vol.164-166 , pp. 1143
- Kugler, S.¹ Shimakawa, K.² Watanabe, T.³ Hayashi, K.⁴ Laszlo, I.⁵ Bellissent, R.⁶

8
- 0028381397
- K. Bang, A. J. Ghajar, R. Komanduri: Thin Solid Films 238 (1994) 172
- (1994) Thin Solid Films , vol.238 , pp. 172
- Bang, K.¹ Ghajar, A.J.² Komanduri, R.³

9
- 0000970562
- H. Savaloni, M. A. Player, E. Gu, G. V. Marr: Rev. Sci. Instrum. 63 (1992) 1497
- (1992) Rev. Sci. Instrum. , vol.63 , pp. 1497
- Savaloni, H.¹ Player, M.A.² Gu, E.³ Marr, G.V.⁴

10
- 0029354510
- H. Brune, H. Roder, K. Bromann, K. Kern: Thin Solid Films 264 (1995) 230
- (1995) Thin Solid Films , vol.264 , pp. 230
- Brune, H.¹ Roder, H.² Bromann, K.³ Kern, K.⁴

11
- 21544431995
- H. Widischmann: J. Appl. Phys. 62 (1987) 1800
- (1987) J. Appl. Phys. , vol.62 , pp. 1800
- Widischmann, H.¹

12
- 0024639940
- S. M. Rossnagel: Thin Solid Films 171 (1989) 143
- (1989) Thin Solid Films , vol.171 , pp. 143
- Rossnagel, S.M.¹

13
- 0022769002
- K. H. Muller: Appl. Phys. A 40 (1986) 209
- (1986) Appl. Phys. A , vol.40 , pp. 209
- Muller, K.H.¹

14
- 0000388299
- R. Nimmagadda, R. F. Bunshah: J. Vac. Sci. Technol. 8 (1971) 677
- (1971) J. Vac. Sci. Technol. , vol.8 , pp. 677
- Nimmagadda, R.¹ Bunshah, R.F.²

15
- 0001537872
- R. Chow, R. F. Bunshah: J. Vac. Sci. Technol. 8 (1971) 665
- (1971) J. Vac. Sci. Technol. , vol.8 , pp. 665
- Chow, R.¹ Bunshah, R.F.²

16
- 0002312302
- J. A. Thornton: Thin Solid Films 54 (1978) 23
- (1978) Thin Solid Films , vol.54 , pp. 23
- Thornton, J.A.¹

17
- 21844501819
- H. Steffen, H. Kersten, H. Wulff: J. Vac. Sci. Technol. A 12 (1994) 2780
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 2780
- Steffen, H.¹ Kersten, H.² Wulff, H.³

18
- 0029270879
- H. Kersten, H. Steffen, D. Vender, H. E. Wagner: Vacuum 46 (1995) 305
- (1995) Vacuum , vol.46 , pp. 305
- Kersten, H.¹ Steffen, H.² Vender, D.³ Wagner, H.E.⁴

19
- 0002502983
- H. F. Winters, D. Horne: Phys. Rev. B 10 (1974) 55
- (1974) Phys. Rev. B , vol.10 , pp. 55
- Winters, H.F.¹ Horne, D.²

20
- 0003998388
- CRC Press, 73rd edition
- Handbook of Chemistry and Physics, CRC Press, 73rd edition, 1992/93
- (1992) Handbook of Chemistry and Physics

21
- 0004436264
- H. Kersten, R. J. M. M. Snijkers, J. Schulze, G. M. W. Kroesen, H. Deutsch, F. J. deHoog: Appl. Phys. Lett. 64 (1994) 1496
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1496
- Kersten, H.¹ Snijkers, R.J.M.M.² Schulze, J.³ Kroesen, G.M.W.⁴ Deutsch, H.⁵ DeHoog, F.J.⁶

22
- 0031497310
- N. P. Tandian, E. Pfender: Plasma Chem. and Plasma Proc. 17 (1997) 353
- (1997) Plasma Chem. and Plasma Proc. , vol.17 , pp. 353
- Tandian, N.P.¹ Pfender, E.²

23
- 4243729773
- M. Tychi, P. Kundra, J. F. Behnke, C. Csambal, S. Klagge: J. Phys. IV, 7, C3 (1997) 397
- (1997) J. Phys. IV , vol.7 C3 , pp. 397
- Tychi, M.¹ Kundra, P.² Behnke, J.F.³ Csambal, C.⁴ Klagge, S.⁵

24
- 84984290279
- F. Adler, H. Kersten, H. Steffen: Contrib. Plasma Phys. 35 (1995) 213
- (1995) Contrib. Plasma Phys. , vol.35 , pp. 213
- Adler, F.¹ Kersten, H.² Steffen, H.³

25
- 0001193179
- D. E. Rapakoulias, D. E. Gerasimou: J. Appl. Phys. 62 (1987) 402
- (1987) J. Appl. Phys. , vol.62 , pp. 402
- Rapakoulias, D.E.¹ Gerasimou, D.E.²

26
- 0001556910
- M. Asscher, W. L. Guthrie, T. H. Lin, G. A. Somorjai: J. Chem. Phys. 78 (1983) 6992
- (1983) J. Chem. Phys. , vol.78 , pp. 6992
- Asscher, M.¹ Guthrie, W.L.² Lin, T.H.³ Somorjai, G.A.⁴

27
- 0000192110
- A. Durandet, O. Joubert, J. Pelletier, M. Pichot: J. Appl. Phys. 67 (1990) 3862
- (1990) J. Appl. Phys. , vol.67 , pp. 3862
- Durandet, A.¹ Joubert, O.² Pelletier, J.³ Pichot, M.⁴

28
- 0031074217
- H. Kersten, H. Deutsch, J. F. Behnke: Vacuum 48 (1997) 123
- (1997) Vacuum , vol.48 , pp. 123
- Kersten, H.¹ Deutsch, H.² Behnke, J.F.³

29
- 0002086831
- H. P. Bonzel, R. Ku: Surf. Sci. 33 (1972) 91
- (1972) Surf. Sci. , vol.33 , pp. 91
- Bonzel, H.P.¹ Ku, R.²

30
- 0040016917
- D. D. Deley: Chem. Ind. 1 (1976) 12
- (1976) Chem. Ind. , vol.1 , pp. 12
- Deley, D.D.¹

31
- 0004448483
- Loughborough
- J. A. G. Baggerman, R. J. Visser, E. J. H. Collart: in Proceedings ISPC-11, Loughborough, 1993, p.1410
- (1993) Proceedings ISPC-11 , pp. 1410
- Baggerman, J.A.G.¹ Visser, R.J.² Collart, E.J.H.³

32
- 0001032782
- H. Kersten, E. Stoffels, W. W. Stoffels, M. Otte, C. Csambal, H. Deutsch, R. Hippler: J. Appl. Phys. 87 (2000) 3637
- (2000) J. Appl. Phys. , vol.87 , pp. 3637
- Kersten, H.¹ Stoffels, E.² Stoffels, W.W.³ Otte, M.⁴ Csambal, C.⁵ Deutsch, H.⁶ Hippler, R.⁷

33
- 0002312302
- J. A. Thornton: Thin Solid Films 54 (1978) 23
- (1978) Thin Solid Films , vol.54 , pp. 23
- Thornton, J.A.¹

34
- 0000170470
- R. Wendt, K. Ellmer, K. Wiesemann: J. Appl. Phys. 82 (1997) 2115
- (1997) J. Appl. Phys. , vol.82 , pp. 2115
- Wendt, R.¹ Ellmer, K.² Wiesemann, K.³

35
- 0038831944
- submitted
- H. Kersten, G. M. W. Kroesen, H. Deutsch, R. Hippler: submitted
- Kersten, H.¹ Kroesen, G.M.W.² Deutsch, H.³ Hippler, R.⁴

36
- 0039424581
- in print
- G. H. P. M. Swinkels, H. Kersten, H. Deutsch, G. M. W. Kroesen: J. Appl. Phys. 88 (2000) in print
- (2000) J. Appl. Phys. , vol.88
- Swinkels, G.H.P.M.¹ Kersten, H.² Deutsch, H.³ Kroesen, G.M.W.⁴

37
- 0040609994
- to appear
- H. Kersten, D. Rohde, J. Berndt, H. Deutsch, R. Hippler: Thin Solid Films, to appear
- Thin Solid Films
- Kersten, H.¹ Rohde, D.² Berndt, J.³ Deutsch, H.⁴ Hippler, R.⁵

38
- 0001129254
- W. Eckstein, J. P. Biersack: Z. Physik B 63 (1986) 471
- (1986) Z. Physik B , vol.63 , pp. 471
- Eckstein, W.¹ Biersack, J.P.²

39
- 0039424580
- XXXX
- XXXX

40
- 0003496587
- edited by A. Guthrie and R. K. Wakerling, McGraw-Hill, New York
- D. Bohm: in The characteristics of electrical discharges in magnetic fields, edited by A. Guthrie and R. K. Wakerling, McGraw-Hill, New York, 1949
- (1949) The Characteristics of Electrical Discharges in Magnetic Fields
- Bohm, D.¹

41
- 0032476355
- H. Kersten, G. M. W. Kroesen, R. Hippler: Thin Solid Films 332 (1998) 282
- (1998) Thin Solid Films , vol.332 , pp. 282
- Kersten, H.¹ Kroesen, G.M.W.² Hippler, R.³

42
- 3342930353
- H. Kersten, P. Schmetz, G. M. W. Kroesen: Surface and Coatings Technology 108-109 (1998) 493
- (1998) Surface and Coatings Technology , vol.108-109 , pp. 493
- Kersten, H.¹ Schmetz, P.² Kroesen, G.M.W.³

43
- 0000590902
- M. Klick: J. Appl. Phys. 79 (1996) 3445
- (1996) J. Appl. Phys. , vol.79 , pp. 3445
- Klick, M.¹

44
- 0004433625
- Physics of plasma-wall interactions in controlled fusion, edited by D. E. Post and R. Behrisch
- J. Roth: in Physics of plasma-wall interactions in controlled fusion, NATO ASI Series 131, edited by D. E. Post and R. Behrisch, p.351
- NATO ASI Series , vol.131 , pp. 351
- Roth, J.¹

45
- 84996184566
- M. T. Robinson: Phil. Mag. 17 (1968) 639
- (1968) Phil. Mag. , vol.17 , pp. 639
- Robinson, M.T.¹

46
- 0003691078
- IOP
- Handbook of Thin Film Proc. Technol. (X2), edited by D. A. Glocker and S. I. Shah, IOP, 1995
- (1995) Handbook of Thin Film Proc. Technol. (X2)
- Glocker, D.A.¹ Shah, S.I.²

47
- 0343539532
- Praha
- D. Douai, J. Berndt, J. Winter: in Proceedings ISPC-14, Praha, 1999
- (1999) Proceedings ISPC-14
- Douai, D.¹ Berndt, J.² Winter, J.³

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