Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry

Applied Physics Letters

Volumn 78, Issue 25, 2001, Pages 3962-3964

  Hayashi, Y ^a   Yu, G ^a   Rahman, M M ^a   Krishna, K M ^a   Soga, T ^a   Jimbo, T ^a   Umeno, M ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

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[No Author keywords available]

Indexed keywords

EID: 0040158864     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1374501     Document Type: Article

References (21)

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