Kinetics of O2 + TEOS gas-phase chemical reactions in a remote RF plasma reactor with electron spin resonance

Plasma Chemistry and Plasma Processing

Volumn 16, Issue 2, 1996, Pages 187-194

  Janca J ^a   Talsky A ^a   Zvonicek V ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

ESR; Rate coefficients; Remote microwave discharge; TEOS

Indexed keywords

EID: 0040062051     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01570177     Document Type: Article

References (13)

1. G. B. Raupp. T. S. Cale, and T. H. Gand, J. Vac. Sci. Technol. B10, 37 (1992).
2. T. S. Cale and G. B. Raup, Mater. Sci. Forum 140-142, 1 (1993).
3. M. Saron and I. Emesh, Mater. Sci. Forum 140-142, 269 (1993).
4. F. Fracassi, R. d'Agostino, and P. Favia, J. Electrochem. Soc. 139, 2636 (1992).
5. A. A. Westenberg, Prog. React. Kinet. 7, 23 (1973).
6. N. M. Johnson, J. Walker, C. M. Dolond, K. Winer, and R. A. Street, Appl. Phys. Lett. 54, 1872 (1989).
7. N. M. Johnson, P. V. Santos, J. Walker, and K. S. Stevens, Mater. Res. Soc. Symp. Proc. 219, 703 (1991).
8. N. M. Johnson, J. Walker, and K. S. Stevens, J. Appl. Phys. 69, 2631 (1991).
9. I. Cermak, Thesis, Dept. of Electronics, Charles University, Prague (1994).
10. C. S. Pai and C. P. Chang, J. Appl. Phys. 68, 763 (1990).
11. O. Guymont, Thesis, University in Nancy (1990).
12. T. Kawahara, A. Yuuki, and P. Favia, J. Electrochem. Soc. 139, 2636 (1992).
13. B. L. Chin and E. P. van de Ven, Solid State Technol. 31, 119 (1988).