Surface morphology and structural changes in insulators induced by high-current 60 keV Cu- implantation

Journal of Applied Physics

Volumn 90, Issue 5, 2001, Pages 2195-2199

  Lee, C G ^a   Takeda, Y ^a   Kishimoto, N ^a   Umeda, N ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040029061     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1388599     Document Type: Article

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