Wet rapid thermal oxidation of silicon with a pyrogenic system

Materials Science and Engineering B

Volumn 54 B54, Issue 3, 1998, Pages 153-160

  Lerch, W ^a   Roters, G ^a   Munzinger P ^a   Mader, R ^a   Ostermeir, R ^b  

^a STEAG AG   (Germany)

^b SILTRONIC AG   (Germany)

Author keywords

Deal Grove model; Electrical breakdown; Gate oxide integrity; Pyrogenic steam generator; Silicon; Wet Rapid Thermal Oxidation

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; EPITAXIAL GROWTH; MATHEMATICAL MODELS; STEAM GENERATORS; THERMOOXIDATION;

PYROGENIC SYSTEMS; WET RAPID THERMAL OXIDATION (WRTO);

SEMICONDUCTING SILICON;

EID: 0039982412     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5107(98)00166-4     Document Type: Article

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