Surface orientation and structure of ion beam processed TiN films

Thin Solid Films

Volumn 295, Issue 1-2, 1997, Pages 1-4

  Min, K ^a   Hofmann, S ^a   Shimizu, R ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Ion bombardment; RHEED; Structural properties; Titanium nitride

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL ORIENTATION; INTERFACIAL ENERGY; ION BEAMS; ION BOMBARDMENT; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SURFACE STRUCTURE; THIN FILMS;

STRAIN ENERGY;

TITANIUM NITRIDE;

EID: 0039970106     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09166-3     Document Type: Article

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